Characterization of adaptive optics mirrors using long yrace profilometer

Abstract

A Long Trace Profilometer (LTP) was designed and fabricated in-house primarily to measure the profile of long, non-circularly symmetric grazing incidence optics. This system was used to calibrate the tip-tilt and deformable mirrors that we use for our adaptive optics research program. This paper gives optical layout and details of the LTP and the test results of tip-tilt mirror based on piezo-electric actuators and a deformable mirror based on Micro Electro Mechanical System (MEMS) technology.