Characterization of MOEMS-based adaptive mirror for wavefront correction

Abstract

In real-time wavefront compensation techniques, a conjugate surface of the incoming aberrated wavefront is to be created in real-time. Two types of mirrors are used for this purpose. The first one is a tip-tilt mirror and the second one is a deformable mirror. We have conducted experiments using piezo--electric actuator-based tip-tilt mirror and micro-opto-el.ectromechanica.l systems(MOEMS-based membrane mirror. This paper explains the experimental results of tip-tilt mirror and theoretical. and experimental characteristics of the membrane mirror.